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Condition Notes: All pages and cover are intact including the dust cover, if applicable. Spine may show signs of wear. Pages may include limited notes and highlighting. Shrink wrap, dust covers, or boxed set case may be missing.

Silicon Carbide Microel Ectromechanical Systems for Harsh Environments, Hardc…

Silicon Carbide Microel Ectromechanical Systems for Harsh Environments, Hardcover by Cheung, Rebecca (EDT), ISBN 1860946240, ISBN-13 9781860946240, Brand New, Free shipping in the US This book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. Th contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS.